Flexible Ti-Ni-N Thin Films Prepared by Magnetron Sputtering-David Publishing Company
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Article
Author(s)

Jindrich Musil, Richard Jílek and Radomír Čerstvý

Affiliation(s)

Department of Physics and New Technologies for Information Society (NTIS), European Centre of Excellence, Faculty of Applied Sciences, University of West Bohemia, CZ-306 14 Plzeň, Czech Republic

ABSTRACT

The article reports on flexible Ti-Ni-N films which exhibit an enhanced resistance to cracking in bending. The Ti-Ni-N films
were prepared by reactive magnetron sputtering using a dual magnetron. Results of reported experiments demonstrate that: a low effective Young’s modulus E* = E/(1-ν2) resulting in a high ratio H/E* ≥ 0.1; a high elastic recovery We ≥ 60% and a compressive macrostress (σ < 0) are necessary conditions which ensure that the Ti-Ni-N films exhibit an enhanced resistance against cracking in bending; here E is the Young’s modulus and ν is the Poison’s ratio. The Ti-Ni-N films with these properties belong to a new class of advanced coatings called flexible coatings. These coatings are simultaneously hard, tough and resistant to cracking.

KEYWORDS

Flexible coatings, hardness, Young’s modulus, elastic recovery, macrostress, resistance to cracking.

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